제품소개
제품소개HIGH TEMP ANGLE VALVE
제품적용
- Vacuum isolation
valve
- Valve 내벽 powder 생성 방지
- 반도체 , FPD, etc
제품사양
- Shaft구동
: High temp pneumatic
- Working pressure
: 1mtorr ~ ATM
- 최고 사용 온도 : 200℃
- Shaft seal : Bellows
- Heat type : coil
heater, PTFE jacket heater
- Leak rate : He 5.0E-8 mbar. l/s
- O-ring : Kalrez,
Chemraz
- TC
: K-type Dual
- Position sensor :
Dual
- Port size/Angle :
NW50/90˚,180˚
제품상세
