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PRODUCT

Product
HIGH TEMP GATE VALVE

APPLICATIONS

- Wafer transfer gate valve
- Valve 내벽 powder 생성 방지
- 반도체 , FPD, etc
 

SPECIFICATIONS

- Shaft 구동: High temp pneumatic
- Working pressure : 1mtorr ~ ATM

  (differential pressure: 30mbar)

- 최고 사용 온도 :  220

- Shaft seal : Bellows
- Heat type: Cartridge heater

- Leak rate :  He 5.0E-8 mbar. l/s

- O-ring : Kalrez, Chemraz
- TC : K-type Dual
- Size : 300mm
 

DETAILS

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