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PRODUCT

Product
HIGH TEMP APC VALVE

APPLICATIONS

- Pressure control valve
- Valve 내벽 powder 생성 방지
- 반도체 , FPD, etc
 

SPECIFICATIONS

-Butterfly 구동 : Motor control
- Working pressure : 1mtorr ~ ATM
- 최고 사용 온도 :  200
- Shaft seal : O-ring
- Heat type : Cartridge heater

- Leak rate :  He 5.0E-8 mbar. l/s

- O-ring : Kalrez, Chemraz
- TC : K-type Dual
- Port size/Angle : NW50/180˚
 

DETAILS

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