HIGH TEMP APC VALVE > 제품소개

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PRODUCT

Product

HIGH TEMP APC VALVE

APPLICATIONS

- Pressure control valve

- Valve 내벽 powder 생성 방지

- 반도체 , FPD, etc

SPECIFICATIONS

-Butterfly 구동 : Motor control

- Working pressure : 1mtorr ~ ATM

- 최고 사용 온도 : 200℃

- Shaft seal : O-ring

- Heat type : Cartridge heater

- Leak rate : He 5.0E-8 mbar. l/s

- O-ring : Kalrez, Chemraz

- TC : K-type Dual

- Port size/Angle : NW50/180˚

DETAILS

LIST

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