HIGH TEMP ANGLE VALVE > 제품소개

Product

HIGH TEMP ANGLE VALVE

- Vacuum isolation valve

- Valve 내벽 powder 생성 방지

- 반도체 , FPD, etc

- Shaft구동 : High temp pneumatic

- Working pressure : 1mtorr ~ ATM

- 최고 사용 온도 : 200℃

- Shaft seal : Bellows

- Heat type : coil heater, PTFE jacket heater

- Leak rate : He 5.0E-8 mbar. l/s

- O-ring : Kalrez, Chemraz

- TC : K-type Dual

- Position sensor : Dual

- Port size/Angle : NW50/90˚,180˚

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