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PRODUCT

Product
HIGH TEMP ANGLE VALVE

APPLICATIONS

- Vacuum isolation valve
- Valve 내벽 powder 생성 방지
- 반도체 , FPD, etc
 

SPECIFICATIONS

- Shaft구동 : High temp pneumatic
- Working pressure : 1mtorr ~ ATM

- 최고 사용 온도 : 200

- Shaft seal : Bellows

- Heat type : coil heater, PTFE jacket heater

- Leak rate :  He 5.0E-8 mbar. l/s

- O-ring : Kalrez, Chemraz
- TC : K-type Dual
- Position sensor : Dual
- Port size/Angle : NW50/90˚,180˚
 

DETAILS

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