SPECIFICATIONS
- Butterfly 구동
: Manual
- Working pressure
: 1mtorr ~ ATM
- 최고 사용
온도 : 200℃
- Shaft seal :
O-ring
- Heat type :
Cartridge heater
- Leak rate : He 5.0E-8 mbar. l/s
- O-ring : Kalrez,
Chemraz
- TC
: K-type Dual
- Port size/Angle :
NW50/180˚