HIGH TEMP GATE VALVE > 제품소개 | WIZTEC

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PRODUCT

Product

HIGH TEMP GATE VALVE

APPLICATIONS

- Wafer transfer gate valve

- Valve 내벽 powder 생성 방지

- 반도체 , FPD, etc

SPECIFICATIONS

- Shaft 구동: High temp pneumatic

- Working pressure : 1mtorr ~ ATM

(differential pressure: 30mbar)

- 최고 사용 온도 : 220℃

- Shaft seal : Bellows

- Heat type: Cartridge heater

- Leak rate : He 5.0E-8 mbar. l/s

- O-ring : Kalrez, Chemraz

- TC : K-type Dual

- Size : 300mm

DETAILS

LIST

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